{"id":382781,"date":"2025-11-17T11:29:00","date_gmt":"2025-11-17T03:29:00","guid":{"rendered":"https:\/\/pingtungtimes.com.tw\/?p=382781"},"modified":"2025-11-17T11:29:00","modified_gmt":"2025-11-17T03:29:00","slug":"taiyo-holdings%e6%8e%a8%e5%87%ba%e6%ac%a1%e4%b8%96%e4%bb%a3%e5%8d%8a%e5%b0%8e%e9%ab%94%e5%b0%81%e8%a3%9d%e6%9d%90%e6%96%99fpim-tm-series-%e6%88%90%e5%8a%9f%e6%96%bc12%e5%90%8b%e6%99%b6%e5%9c%93","status":"publish","type":"post","link":"https:\/\/pingtungtimes.com.tw\/?p=382781","title":{"rendered":"Taiyo Holdings\u63a8\u51fa\u6b21\u4e16\u4ee3\u534a\u5c0e\u9ad4\u5c01\u88dd\u6750\u6599FPIM (TM) Series \u6210\u529f\u65bc12\u540b\u6676\u5713\u4e0a\u9996\u6b21\u5be6\u73feCD 1.6\u5fae\u7c73\u4e09\u5c64RDL\u7d50\u69cb"},"content":{"rendered":"<div>\n<p>&#8211; \u8ad6\u6587\u767c\u8868\u65bc14th IEEE CPMT Symposium Japan (ICSJ 2025) &#8211;<\/p>\n<p><span class=\"legendSpanClass\">\u6771\u4eac<\/span><span class=\"legendSpanClass\">2025\u5e7411\u670817\u65e5<\/span> 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\/>\uff08*3\uff09\u65bc\u7d55\u7de3\u819c\u5f62\u6210\u4f48\u7dda\u6e9d\u69fd\uff0c\u900f\u904e\u6ffa\u934d\u3001CVD\u3001\u96fb\u934d\u7b49\u65b9\u5f0f\u586b\u5145\u6e9d\u69fd\u4e26\u5f62\u6210\u5716\u5f62\u4e4b\u6cd5\u3002<br \/>\uff08*4\uff09CD\uff08\u95dc\u9375\u5c3a\u5bf8\uff09\u6307\u5fae\u7d30\u5716\u5f62\u7684\u5c3a\u5bf8\u898f\u683c\u3002<br \/>\uff08*5\uff09Veeco Low NA (0.16) i-line\u66dd\u5149\u7cfb\u7d71AP300\uff08\u7b2c\u4e00\u4ee3\uff09\u3002<br \/>\uff08*6\uff09CMP\uff08\u5316\u5b78\u6a5f\u68b0\u5e73\u5766\u5316\uff09\u5de5\u85dd\u662f\u534a\u5c0e\u9ad4\u88fd\u9020\u4e2d\u900f\u904e\u5316\u5b78\u8207\u6a5f\u68b0\u4f5c\u7528\u4f7f\u6676\u5713\u8868\u9762\u5e73\u5766\u5316\u7684\u88fd\u7a0b\u3002<\/p>\n<p>\u5171\u540c\u767c\u8868\u8ad6\u6587\u6a19\u984c<br \/>Development of 1.6 micrometer Fine-Pitch RDL Damascene Process using Low-NA i-Line Stepper and a New Negative-tone Photosensitive Dielectric Material\uff08\u4f7f\u7528Low-NA i-Line Stepper\u548c\u65b0\u7684\u8ca0\u578b\u5149\u654f\u4ecb\u96fb\u6750\u6599\u958b\u767c1.6\u5fae\u7c73\u7d30\u9593\u8dddRDL\u5927\u99ac\u58eb\u9769\u5de5\u85dd\uff09<\/p>\n<p>\u8a55\u4f30\u6a23\u54c1\u7d50\u69cb\uff1a<br \/><a href=\"https:\/\/cdn.kyodonewsprwire.jp\/prwfile\/release\/M108899\/202511108806\/_prw_PI1fl_9Rzhabg4.png\" target=\"_blank\" rel=\"nofollow\" style=\"color: #0000FF\">https:\/\/cdn.kyodonewsprwire.jp\/prwfile\/release\/M108899\/202511108806\/_prw_PI1fl_9Rzhabg4.png<\/a><\/p>\n<p>\u7522\u54c1\u5716\u7247\uff1a<br \/><a href=\"https:\/\/cdn.kyodonewsprwire.jp\/prwfile\/release\/M108899\/202511108806\/_prw_PI2fl_yb3oqDfr.png\" target=\"_blank\" rel=\"nofollow\" style=\"color: #0000FF\">https:\/\/cdn.kyodonewsprwire.jp\/prwfile\/release\/M108899\/202511108806\/_prw_PI2fl_yb3oqDfr.png<\/a><\/p>\n<p>\u95dc\u65bcimec\u8207Taiyo Holdings\u7684\u5408\u4f5c<br \/>\u7e3d\u90e8\u4f4d\u65bc\u6bd4\u5229\u6642\u7684imec\uff0c\u5168\u7a31\u70ba\u300cInteruniversity Microelectronics Centre\u300d\uff0c\u662f\u5168\u7403\u6700\u5927\u7684\u534a\u5c0e\u9ad4\u7814\u7a76\u6a5f\u69cb\u4e4b\u4e00\uff0c\u900f\u904e\u8207\u5168\u7403\u5927\u5b78\u53ca\u4f01\u696d\u5408\u4f5c\u63a8\u52d5\u958b\u653e\u5275\u65b0\uff0c\u4fc3\u9032\u524d\u6cbf\u534a\u5c0e\u9ad4\u6280\u8853\u767c\u5c55\u30022022\u5e7410\u6708\uff0cimec\u8207Taiyo Holdings\u958b\u59cb\u5c31\u5927\u99ac\u58eb\u9769\u5de5\u85dd\u7528\u7d30\u9593\u8dddRDL\u8ca0\u578b\u5149\u654f\u7d55\u7de3\u6750\u6599\uff08\u4e00\u7a2e\u6b21\u4e16\u4ee3\u534a\u5c0e\u9ad4\u5c01\u88dd\u6750\u6599\uff09\u5c55\u958b\u5171\u540c\u7814\u7a76\u3002\u81ea2024\u5e7411\u6708\u8d77\uff0cTaiyo Holdings\u6d3e\u99d0\u7814\u7a76\u54e1\u81f3imec\uff0c\u5efa\u7acb\u66f4\u7dca\u5bc6\u5408\u4f5c\u74b0\u5883\uff0c\u6301\u7e8c\u9032\u884c\u5148\u9032\u534a\u5c0e\u9ad4\u6750\u6599\u4e4b<span id=\"spanHghlt82af\">\u65e5\u5e38<\/span>\u7814\u767c\u5de5\u4f5c\u3002<\/p>\n<p>&#8211; Taiyo Holdings Co., Ltd.\u516c\u53f8\u6982\u6cc1\uff1a<br \/><a href=\"https:\/\/kyodonewsprwire.jp\/attach\/202511108806-O1-ttbIvpYv.pdf\" target=\"_blank\" rel=\"nofollow\" style=\"color: #0000FF\">https:\/\/kyodonewsprwire.jp\/attach\/202511108806-O1-ttbIvpYv.pdf<\/a><\/p>\n<p>\u5b98\u65b9\u7db2\u7ad9\uff1a<a href=\"https:\/\/www.taiyo-hd.co.jp\/en\/index.html\" target=\"_blank\" rel=\"nofollow\" style=\"color: #0000FF\">https:\/\/www.taiyo-hd.co.jp\/en\/index.html<\/a><\/p>\n<\/div>\n","protected":false},"excerpt":{"rendered":"<p>&#8211; \u8ad6\u6587\u767c\u8868\u65bc14&#8230;<\/p>\n","protected":false},"author":16,"featured_media":199219,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"fifu_image_url":"","fifu_image_alt":"","footnotes":""},"categories":[40567],"tags":[],"class_list":["post-382781","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-40567"],"acf":[],"yoast_head":"<!-- This site is optimized with the 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4.0\u5fae\u7c73\uff09\u3001RDL2\u5c64CD\u70ba1.6\u5fae\u7c73\u3002\u9019\u4e9b\u6578\u503c\u6975\u63a5\u8fd1\u672c\u7814\u7a76\u63a1\u7528\u7684\u4f4eNA stepper (*5)\u7684\u89e3\u6790\u6975\u9650\u3002\u6b64\u5916\uff0c\u91dd\u5c0dCD 1.6\u5fae\u7c73\u7684RDL1\u5c64\u9032\u884c\u96fb\u6c23\u7279\u6027\u8a55\u4f30\uff0c\u5176\u6f0f\u96fb\u96fb\u6d41\u8207\u963b\u6297\u8868\u73fe\u5747\u5c6c\u826f\u597d\u3002\u900f\u904e\u8207imec\u7684\u5171\u540c\u7814\u7a76\uff0c\u78ba\u8a8d\u8a72\u6750\u6599\u5177\u5099\u512a\u7570\u96fb\u6c23\u7279\u6027\u3001\u9ad8\u89e3\u6790\u5ea6\uff0c\u4ee5\u53ca\u9069\u61c9CMP\u5de5\u85dd(*6)\u7684\u54c1\u8cea\u8981\u6c42\u3002 \u672a\u4f86\uff0c\u516c\u53f8\u76ee\u6a19\u662f\u5be6\u73fe\u5728CD 500\u7d0d\u7c73\u6216\u66f4\u5c0f\u7684\u6676\u5713\u4e0a\u69cb\u5efaRDL\uff0c\u4e26\u6301\u7e8c\u9a57\u8b49\u96fb\u6c23\u7279\u6027\u4e4b\u9577\u671f\u6027\u80fd\u8207\u53ef\u9760\u6027\u3002Taiyo Holdings\u5c07\u6301\u7e8c\u958b\u767c\u6709\u52a9\u63a8\u52d5\u534a\u5c0e\u9ad4\u5c01\u88dd\u9818\u57df\u9032\u6b65\u7684\u6750\u6599\uff0c\u5305\u62ec\u9032\u4e00\u6b65\u63d0\u5347AI\u534a\u5c0e\u9ad4\u6027\u80fd\u3002\u6b64\u5916\uff0c\u8a72\u6750\u6599\u5df2\u65bc2025\u5e74\u958b\u59cb\u63d0\u4f9bR&amp;D\u7528\u5c0f\u6279\u91cf\u6a23\u54c1\u3002 \u8a3b\uff1a\uff08*1\uff09RDL\uff08\u91cd\u4f48\u7dda\u5c64\uff09\u70ba\u5f62\u6210\u65bc\u534a\u5c0e\u9ad4\u6676\u7247\u8868\u9762\u3001\u7528\u4ee5\u91cd\u65b0\u5206\u4f48\u96fb\u6c23\u4f48\u7dda\u7684\u5c64\u72c0\u7d50\u69cb\u3002\uff08*2\uff09\u5148\u65bc\u6574\u9ad4\u8868\u9762\u5f62\u6210\u8584\u7c7d\u6676\u5c64\uff0c\u518d\u900f\u904e\u96fb\u934d\u65bc\u4f48\u7dda\u5340\u57df\u5f62\u6210\u4f48\u7dda\u5716\u5f62\u4e4b\u6cd5\u3002\uff08*3\uff09\u65bc\u7d55\u7de3\u819c\u5f62\u6210\u4f48\u7dda\u6e9d\u69fd\uff0c\u900f\u904e\u6ffa\u934d\u3001CVD\u3001\u96fb\u934d\u7b49\u65b9\u5f0f\u586b\u5145\u6e9d\u69fd\u4e26\u5f62\u6210\u5716\u5f62\u4e4b\u6cd5\u3002\uff08*4\uff09CD\uff08\u95dc\u9375\u5c3a\u5bf8\uff09\u6307\u5fae\u7d30\u5716\u5f62\u7684\u5c3a\u5bf8\u898f\u683c\u3002\uff08*5\uff09Veeco Low NA (0.16) i-line\u66dd\u5149\u7cfb\u7d71AP300\uff08\u7b2c\u4e00\u4ee3\uff09\u3002\uff08*6\uff09CMP\uff08\u5316\u5b78\u6a5f\u68b0\u5e73\u5766\u5316\uff09\u5de5\u85dd\u662f\u534a\u5c0e\u9ad4\u88fd\u9020\u4e2d\u900f\u904e\u5316\u5b78\u8207\u6a5f\u68b0\u4f5c\u7528\u4f7f\u6676\u5713\u8868\u9762\u5e73\u5766\u5316\u7684\u88fd\u7a0b\u3002 \u5171\u540c\u767c\u8868\u8ad6\u6587\u6a19\u984cDevelopment of 1.6 micrometer Fine-Pitch RDL Damascene Process using Low-NA i-Line Stepper and a New Negative-tone Photosensitive Dielectric Material\uff08\u4f7f\u7528Low-NA i-Line Stepper\u548c\u65b0\u7684\u8ca0\u578b\u5149\u654f\u4ecb\u96fb\u6750\u6599\u958b\u767c1.6\u5fae\u7c73\u7d30\u9593\u8dddRDL\u5927\u99ac\u58eb\u9769\u5de5\u85dd\uff09 \u8a55\u4f30\u6a23\u54c1\u7d50\u69cb\uff1ahttps:\/\/cdn.kyodonewsprwire.jp\/prwfile\/release\/M108899\/202511108806\/_prw_PI1fl_9Rzhabg4.png \u7522\u54c1\u5716\u7247\uff1ahttps:\/\/cdn.kyodonewsprwire.jp\/prwfile\/release\/M108899\/202511108806\/_prw_PI2fl_yb3oqDfr.png \u95dc\u65bcimec\u8207Taiyo Holdings\u7684\u5408\u4f5c\u7e3d\u90e8\u4f4d\u65bc\u6bd4\u5229\u6642\u7684imec\uff0c\u5168\u7a31\u70ba\u300cInteruniversity Microelectronics Centre\u300d\uff0c\u662f\u5168\u7403\u6700\u5927\u7684\u534a\u5c0e\u9ad4\u7814\u7a76\u6a5f\u69cb\u4e4b\u4e00\uff0c\u900f\u904e\u8207\u5168\u7403\u5927\u5b78\u53ca\u4f01\u696d\u5408\u4f5c\u63a8\u52d5\u958b\u653e\u5275\u65b0\uff0c\u4fc3\u9032\u524d\u6cbf\u534a\u5c0e\u9ad4\u6280\u8853\u767c\u5c55\u30022022\u5e7410\u6708\uff0cimec\u8207Taiyo Holdings\u958b\u59cb\u5c31\u5927\u99ac\u58eb\u9769\u5de5\u85dd\u7528\u7d30\u9593\u8dddRDL\u8ca0\u578b\u5149\u654f\u7d55\u7de3\u6750\u6599\uff08\u4e00\u7a2e\u6b21\u4e16\u4ee3\u534a\u5c0e\u9ad4\u5c01\u88dd\u6750\u6599\uff09\u5c55\u958b\u5171\u540c\u7814\u7a76\u3002\u81ea2024\u5e7411\u6708\u8d77\uff0cTaiyo Holdings\u6d3e\u99d0\u7814\u7a76\u54e1\u81f3imec\uff0c\u5efa\u7acb\u66f4\u7dca\u5bc6\u5408\u4f5c\u74b0\u5883\uff0c\u6301\u7e8c\u9032\u884c\u5148\u9032\u534a\u5c0e\u9ad4\u6750\u6599\u4e4b\u65e5\u5e38\u7814\u767c\u5de5\u4f5c\u3002 - Taiyo Holdings Co., Ltd.\u516c\u53f8\u6982\u6cc1\uff1ahttps:\/\/kyodonewsprwire.jp\/attach\/202511108806-O1-ttbIvpYv.pdf \u5b98\u65b9\u7db2\u7ad9\uff1ahttps:\/\/www.taiyo-hd.co.jp\/en\/index.html\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/pingtungtimes.com.tw\/?p=382781\" \/>\n<meta property=\"og:locale\" content=\"zh_TW\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Taiyo Holdings\u63a8\u51fa\u6b21\u4e16\u4ee3\u534a\u5c0e\u9ad4\u5c01\u88dd\u6750\u6599FPIM (TM) Series \u6210\u529f\u65bc12\u540b\u6676\u5713\u4e0a\u9996\u6b21\u5be6\u73feCD 1.6\u5fae\u7c73\u4e09\u5c64RDL\u7d50\u69cb - \u5c4f\u6771\u6642\u5831\u96fb\u5b50\u5831\" \/>\n<meta property=\"og:description\" content=\"- \u8ad6\u6587\u767c\u8868\u65bc14th IEEE CPMT Symposium Japan (ICSJ 2025) - \u6771\u4eac2025\u5e7411\u670817\u65e5 \/\u7f8e\u901a\u793e\/ -- \u7e3d\u90e8\u4f4d\u65bc\u6771\u4eac\u7684Taiyo Holdings Co., Ltd.\uff08\u8b49\u5238\u4ee3\u78bc\uff1a4626\uff1b\u4ee5\u4e0b\u7c21\u7a31\u300cTaiyo Holdings\u300d\uff09\u65bc2025\u5e7411\u670813\u65e5\u572814th IEEE CPMT Symposium Japan (ICSJ2025)\u4e0a\u767c\u8868\u8207\u5168\u7403\u9802\u5c16\u534a\u5c0e\u9ad4\u7814\u7a76\u6a5f\u69cbimec\u5171\u540c\u64b0\u5beb\u7684\u8ad6\u6587\uff0c\u91cd\u9ede\u4ecb\u7d39\u4e86\u4f5c\u70ba\u6b21\u4e16\u4ee3\u534a\u5c0e\u9ad4\u5c01\u88dd\u6750\u6599\u958b\u767c\u7684\u3001\u7528\u65bc\u5927\u99ac\u58eb\u9769\u5de5\u85dd\u7684\u7d30\u9593\u8dddRDL (*1)\u8ca0\u578b\u5149\u654f\u7d55\u7de3\u6750\u6599\u300cFPIM (TM) Series\u300d\uff08\u4ee5\u4e0b\u7c21\u7a31\u300c\u8a72\u6750\u6599\u300d\uff09\u3002 RDL\u662f\u5be6\u73fe\u5148\u9032\u534a\u5c0e\u9ad4\u5c01\u88dd\u7d50\u69cb\u4e2d\u9ad8\u6548\u96fb\u6c23\u9023\u63a5\u7684\u91cd\u8981\u6280\u8853\uff0c\u76ee\u524d\u4e3b\u8981\u63a1\u7528\u534a\u52a0\u6210\u5de5\u85dd(SAP) (*2)\u88fd\u9020\u3002imec\u6307\u51fa\uff0c\u96a8\u8457\u4f48\u7dda\u7d30\u5fae\u5316\u9700\u6c42\u767c\u5c55\uff0c\u672a\u4f86\u8981\u5f62\u6210\u7dda\u9593\u8ddd1.6\u5fae\u7c73\u53ca\u4ee5\u4e0b\u7684\u4e92\u9023\u7d50\u69cb\uff0c\u5927\u99ac\u58eb\u9769\u5de5\u85dd(*3)\u5c07\u6210\u70ba\u5fc5\u8981\u6280\u8853\u3002\u70ba\u6b64\uff0cTaiyo Holdings\u6301\u7e8c\u958b\u767c\u5c08\u7528\u65bc\u5927\u99ac\u58eb\u9769\u5de5\u85dd\u7684\u6b21\u4e16\u4ee3\u7d30\u9593\u8dddRDL\u6750\u6599\uff0c\u4e26\u81ea2022\u5e7410\u6708\u8d77\u8207imec\u5c55\u958b\u5171\u540c\u7814\u7a76\u3002\u672c\u7814\u7a76\u904b\u7528\u8a72\u6750\u6599\u572812\u540b\u6676\u5713\u4e0a\u6210\u529f\u5f62\u6210\u4e09\u5c64RDL\u7d50\u69cb\uff0c\u7d93\u8a55\u4f30\u5404\u5c64\u4f48\u7dda\u9593\u8ddd\u5747\u9054\u6210\u76ee\u6a19\u898f\u683c\uff1a\u6676\u5713\u4e0aRDL1\u5c64CD (*4)\u90541.6\u5fae\u7c73\u3001\u901a\u5b54\u5c64CD\u70ba2.0\u5fae\u7c73\uff08\u901a\u5b54\u4e2d\u5fc3\u9593\u8ddd\u70baCD 4.0\u5fae\u7c73\uff09\u3001RDL2\u5c64CD\u70ba1.6\u5fae\u7c73\u3002\u9019\u4e9b\u6578\u503c\u6975\u63a5\u8fd1\u672c\u7814\u7a76\u63a1\u7528\u7684\u4f4eNA stepper (*5)\u7684\u89e3\u6790\u6975\u9650\u3002\u6b64\u5916\uff0c\u91dd\u5c0dCD 1.6\u5fae\u7c73\u7684RDL1\u5c64\u9032\u884c\u96fb\u6c23\u7279\u6027\u8a55\u4f30\uff0c\u5176\u6f0f\u96fb\u96fb\u6d41\u8207\u963b\u6297\u8868\u73fe\u5747\u5c6c\u826f\u597d\u3002\u900f\u904e\u8207imec\u7684\u5171\u540c\u7814\u7a76\uff0c\u78ba\u8a8d\u8a72\u6750\u6599\u5177\u5099\u512a\u7570\u96fb\u6c23\u7279\u6027\u3001\u9ad8\u89e3\u6790\u5ea6\uff0c\u4ee5\u53ca\u9069\u61c9CMP\u5de5\u85dd(*6)\u7684\u54c1\u8cea\u8981\u6c42\u3002 \u672a\u4f86\uff0c\u516c\u53f8\u76ee\u6a19\u662f\u5be6\u73fe\u5728CD 500\u7d0d\u7c73\u6216\u66f4\u5c0f\u7684\u6676\u5713\u4e0a\u69cb\u5efaRDL\uff0c\u4e26\u6301\u7e8c\u9a57\u8b49\u96fb\u6c23\u7279\u6027\u4e4b\u9577\u671f\u6027\u80fd\u8207\u53ef\u9760\u6027\u3002Taiyo Holdings\u5c07\u6301\u7e8c\u958b\u767c\u6709\u52a9\u63a8\u52d5\u534a\u5c0e\u9ad4\u5c01\u88dd\u9818\u57df\u9032\u6b65\u7684\u6750\u6599\uff0c\u5305\u62ec\u9032\u4e00\u6b65\u63d0\u5347AI\u534a\u5c0e\u9ad4\u6027\u80fd\u3002\u6b64\u5916\uff0c\u8a72\u6750\u6599\u5df2\u65bc2025\u5e74\u958b\u59cb\u63d0\u4f9bR&amp;D\u7528\u5c0f\u6279\u91cf\u6a23\u54c1\u3002 \u8a3b\uff1a\uff08*1\uff09RDL\uff08\u91cd\u4f48\u7dda\u5c64\uff09\u70ba\u5f62\u6210\u65bc\u534a\u5c0e\u9ad4\u6676\u7247\u8868\u9762\u3001\u7528\u4ee5\u91cd\u65b0\u5206\u4f48\u96fb\u6c23\u4f48\u7dda\u7684\u5c64\u72c0\u7d50\u69cb\u3002\uff08*2\uff09\u5148\u65bc\u6574\u9ad4\u8868\u9762\u5f62\u6210\u8584\u7c7d\u6676\u5c64\uff0c\u518d\u900f\u904e\u96fb\u934d\u65bc\u4f48\u7dda\u5340\u57df\u5f62\u6210\u4f48\u7dda\u5716\u5f62\u4e4b\u6cd5\u3002\uff08*3\uff09\u65bc\u7d55\u7de3\u819c\u5f62\u6210\u4f48\u7dda\u6e9d\u69fd\uff0c\u900f\u904e\u6ffa\u934d\u3001CVD\u3001\u96fb\u934d\u7b49\u65b9\u5f0f\u586b\u5145\u6e9d\u69fd\u4e26\u5f62\u6210\u5716\u5f62\u4e4b\u6cd5\u3002\uff08*4\uff09CD\uff08\u95dc\u9375\u5c3a\u5bf8\uff09\u6307\u5fae\u7d30\u5716\u5f62\u7684\u5c3a\u5bf8\u898f\u683c\u3002\uff08*5\uff09Veeco Low NA (0.16) i-line\u66dd\u5149\u7cfb\u7d71AP300\uff08\u7b2c\u4e00\u4ee3\uff09\u3002\uff08*6\uff09CMP\uff08\u5316\u5b78\u6a5f\u68b0\u5e73\u5766\u5316\uff09\u5de5\u85dd\u662f\u534a\u5c0e\u9ad4\u88fd\u9020\u4e2d\u900f\u904e\u5316\u5b78\u8207\u6a5f\u68b0\u4f5c\u7528\u4f7f\u6676\u5713\u8868\u9762\u5e73\u5766\u5316\u7684\u88fd\u7a0b\u3002 \u5171\u540c\u767c\u8868\u8ad6\u6587\u6a19\u984cDevelopment of 1.6 micrometer Fine-Pitch RDL Damascene Process using Low-NA i-Line Stepper and a New Negative-tone Photosensitive Dielectric Material\uff08\u4f7f\u7528Low-NA i-Line Stepper\u548c\u65b0\u7684\u8ca0\u578b\u5149\u654f\u4ecb\u96fb\u6750\u6599\u958b\u767c1.6\u5fae\u7c73\u7d30\u9593\u8dddRDL\u5927\u99ac\u58eb\u9769\u5de5\u85dd\uff09 \u8a55\u4f30\u6a23\u54c1\u7d50\u69cb\uff1ahttps:\/\/cdn.kyodonewsprwire.jp\/prwfile\/release\/M108899\/202511108806\/_prw_PI1fl_9Rzhabg4.png \u7522\u54c1\u5716\u7247\uff1ahttps:\/\/cdn.kyodonewsprwire.jp\/prwfile\/release\/M108899\/202511108806\/_prw_PI2fl_yb3oqDfr.png \u95dc\u65bcimec\u8207Taiyo Holdings\u7684\u5408\u4f5c\u7e3d\u90e8\u4f4d\u65bc\u6bd4\u5229\u6642\u7684imec\uff0c\u5168\u7a31\u70ba\u300cInteruniversity Microelectronics Centre\u300d\uff0c\u662f\u5168\u7403\u6700\u5927\u7684\u534a\u5c0e\u9ad4\u7814\u7a76\u6a5f\u69cb\u4e4b\u4e00\uff0c\u900f\u904e\u8207\u5168\u7403\u5927\u5b78\u53ca\u4f01\u696d\u5408\u4f5c\u63a8\u52d5\u958b\u653e\u5275\u65b0\uff0c\u4fc3\u9032\u524d\u6cbf\u534a\u5c0e\u9ad4\u6280\u8853\u767c\u5c55\u30022022\u5e7410\u6708\uff0cimec\u8207Taiyo Holdings\u958b\u59cb\u5c31\u5927\u99ac\u58eb\u9769\u5de5\u85dd\u7528\u7d30\u9593\u8dddRDL\u8ca0\u578b\u5149\u654f\u7d55\u7de3\u6750\u6599\uff08\u4e00\u7a2e\u6b21\u4e16\u4ee3\u534a\u5c0e\u9ad4\u5c01\u88dd\u6750\u6599\uff09\u5c55\u958b\u5171\u540c\u7814\u7a76\u3002\u81ea2024\u5e7411\u6708\u8d77\uff0cTaiyo Holdings\u6d3e\u99d0\u7814\u7a76\u54e1\u81f3imec\uff0c\u5efa\u7acb\u66f4\u7dca\u5bc6\u5408\u4f5c\u74b0\u5883\uff0c\u6301\u7e8c\u9032\u884c\u5148\u9032\u534a\u5c0e\u9ad4\u6750\u6599\u4e4b\u65e5\u5e38\u7814\u767c\u5de5\u4f5c\u3002 - Taiyo Holdings Co., Ltd.\u516c\u53f8\u6982\u6cc1\uff1ahttps:\/\/kyodonewsprwire.jp\/attach\/202511108806-O1-ttbIvpYv.pdf \u5b98\u65b9\u7db2\u7ad9\uff1ahttps:\/\/www.taiyo-hd.co.jp\/en\/index.html\" \/>\n<meta property=\"og:url\" content=\"https:\/\/pingtungtimes.com.tw\/?p=382781\" \/>\n<meta property=\"og:site_name\" content=\"\u5c4f\u6771\u6642\u5831\u96fb\u5b50\u5831\" \/>\n<meta property=\"article:publisher\" content=\"https:\/\/www.facebook.com\/pingtungnews\" \/>\n<meta property=\"article:published_time\" content=\"2025-11-17T03:29:00+00:00\" \/>\n<meta property=\"og:image\" content=\"https:\/\/pingtungtimes.com.tw\/wp-content\/uploads\/2023\/02\/logo-150.png\" \/>\n<meta name=\"author\" content=\"\u7f8e\u901a\u793e\" \/>\n<meta name=\"twitter:card\" 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